The purpose of the minienvironment is to isolate a process tool from its surroundings and the adjacent process tools. It prevents cross contamination, yields improved operating cost thus leading to a better and more efficient process overall. Fluent software can help you optimize these minienvironments by eliminating recirculation zones that can trap and carry contaminants through their sources (such as moving parts in the minienvironment) to wafers and to ensure that external air doesn't flow into the enclosure. This is done by determining flow and pressure profiles, and tracking airborne particles.

Find out more about preventing wafer contamination.

FLUENT CFD analysis is used to optimize contamination-free performance of the Asyst Plus PortalTM, an ultra-clean minienvironment for automated 200 and 300 mm wafer handling.
Courtesy of Asyst Technologies, Inc.